Generalized predictive control of temperature on an atomic layer deposition reactor

- He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Chu, Bo, Cao, Kun, Shan, Bin, Chen, Rong

Temperature control for nano-scale films by spatially-separated atomic layer deposition based on generalized predictive control

- He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Lin, Ji-Long, Tian, Kan, Shan, Bin, Chen, Rong